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Equipment performance

Capacity: up to 9600 / 8000 / 10000 / 12000 Wafers / hour

Effective utilization rate of equipment: ≥ 98%

Fragment rate: ≤ 0.01%

Silicon wafer specification

Silicon wafer thickness: ≥ 140 μ m

Silicon wafer size: 156.75 * 156.75mm-212 * 212mm

Flower basket type: low surface carrier (LSC) made by PVDF

Space between flower baskets: 4.1mm

Basket capacity: 100-120 wafers

Manipulator system

Manipulator: 4 sets

Servo motor: 8 PC

Lift time: less than 5 sec

Equipment size

Length * width * height: 15998 * 2630 * 2574mm

Length * width * height: 16200 * 3000 * 2574mm

Length * width * height: 17730 * 3000 * 2574mm

Length * width * height: 25560 * 2960 * 2574mm

direction

Working direction：Left→Right  / Right→Left（TBD）

power supply

Power supply: AC380V 3Ph + PE + n 50Hz (TBD)

Control power supply: DC 24V

Full load power supply: 230kw / 138kw

Recommended maximum fuse size: 225A / 135a

Installation requirements

Minimum ground bearing capacity: 750KG / ㎡

Minimum workshop height: 3.5m

Clean room level: iso7 (10K class)

Ambient temperature: 17 ℃＜ RT ＜ 30 ℃

Maximum humidity: 70%